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Published in 2017 at "IEEE Transactions on Electron Devices"
DOI: 10.1109/ted.2017.2736163
Abstract: A new method of forming an ohmic contact without an increase in parasitic resistance is proposed in the Ti/GeO2/Ge substrate. Fermi-level depinning in Ti/GeO2/n–Ge contacts is possible with the formation of an interfacial TiOx layer…
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Keywords:
level depinning;
via interfacial;
interfacial reaction;
geo2 ... See more keywords