Comparison of passivation properties of plasma-assisted ALD and APCVD deposited Al2O3 with SiNx capping
Sign Up to like & getrecommendations! Published in 2020 at "Solar Energy Materials and Solar Cells"
DOI: 10.1016/j.solmat.2020.110718
Abstract: Abstract In this paper, we report on the direct comparison of Al2O3 films deposited by plasma-assisted atomic layer deposition (ALD) and atmospheric pressure chemical vapor deposition (APCVD) techniques on the passivation properties of both bare… read more here.
Keywords: deposited al2o3; passivation; plasma assisted; ald apcvd ... See more keywords
Structural Studies of C-Ni-Pd Nanocomposite Films Deposited on Al2O3 Substrate
Sign Up to like & getrecommendations! Published in 2017 at "Acta Physica Polonica A"
DOI: 10.12693/aphyspola.131.1409
Abstract: Structural Studies of C–Ni–Pd Nanocomposite Films Deposited on Al2O3 Substrate M. Kozłowski, E. Czerwosz, K. Sobczak and B. Kurowskab,∗ Teleand Radio Research Institute, Ratuszowa 11, PL-03450 Warsaw, Poland Institute of Physics, Polish Academy of Sciences,… read more here.
Keywords: deposited al2o3; al2o3 substrate; structural studies; studies nanocomposite ... See more keywords