Improved interfacial properties of thermal atomic layer deposited AlN on GaN
Sign Up to like & getrecommendations! Published in 2019 at "Vacuum"
DOI: 10.1016/j.vacuum.2018.10.067
Abstract: Abstract The interfacial properties of atomic layer deposited AlN on n-GaN substrate were investigated. Capacitance–voltage (C V) characteristics showed that the sample with a 24 nm thick AlN had lower interface state density than the sample… read more here.
Keywords: aln gan; aln; deposited aln; interfacial properties ... See more keywords
263 nm wavelength UV-C LED on face-to-face annealed sputter-deposited AlN with low screw- and mixed-type dislocation densities
Sign Up to like & getrecommendations! Published in 2022 at "Applied Physics Express"
DOI: 10.35848/1882-0786/ac66c2
Abstract: Regarding deep-ultraviolet optical device applications, face-to-face annealed sputter-deposited AlN (FFA Sp-AlN) is a promising alternative to the conventional metalorganic vapor phase epitaxy (MOVPE)-prepared AlN templates on sapphire substrates. However, FFA Sp-AlN tends to exhibit AlGaN… read more here.
Keywords: face; annealed sputter; deposited aln; face annealed ... See more keywords