Improvement of critical temperature of niobium nitride deposited on 8-inch silicon wafers thanks to an AlN buffer layer
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DOI: 10.1088/1361-6668/abe35e
Abstract: In this paper, we study the crystalline properties and superconducting critical temperature of ultra-thin (5–9 nm) NbN films deposited on 8-inch silicon wafers by reactive sputtering. We show that the deposition of NbN on a… read more here.
Keywords: silicon wafers; nbn aln; deposited inch; critical temperature ... See more keywords