Effect of sputtering power on the chemical composition, microstructure and mechanical properties of CrNx hard coatings deposited by reactive magnetron sputtering
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DOI: 10.1016/j.vacuum.2017.08.036
Abstract: Abstract In this study, the CrN x coatings were deposited by reactive magnetron sputtering at varying sputtering power from 200 to 300 W. The chemical composition, phase structure, surface and cross-sectional morphologies, and mechanical properties of… read more here.
Keywords: deposited reactive; coatings deposited; reactive magnetron; sputtering power ... See more keywords