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Published in 2020 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2020.105204
Abstract: Abstract In this study, tungsten disulfide (WS2) and tungsten trioxide (WO3) thin films are deposited on n-Si by RF sputtering technique. The optical, morphological and structural characteristics of these films are investigated. The XRD patterns…
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Keywords:
voltage;
deposited sputtering;
ws2 wo3;
two dimensional ... See more keywords