Effect of Material of Metal Sublayer and Deposition Configuration on the Texture Formation in the Piezoactive ZnO Films
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DOI: 10.1134/s1063784218010279
Abstract: Effect of material of metal sublayer (aluminum, vanadium, chromium, iron, cobalt, nickel, and copper) and deposition configuration on the formation of the oblique and straight texture in the ZnO films is studied. The films that… read more here.
Keywords: deposition configuration; deposition; sublayer; zno films ... See more keywords