Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching.
Sign Up to like & getrecommendations! Published in 2021 at "ACS nano"
DOI: 10.1021/acsnano.1c04086
Abstract: Printed component sizes in electronic circuits are approaching 10 nm, but inherent variability in feature alignment during photolithography poses a fundamental barrier for continued device scaling. Deposition-based self-aligned patterning is being introduced, but nuclei defects… read more here.
Keywords: deposition; deposition etching; thin film; self aligned ... See more keywords
A multifunctional plasma and deposition sensor for the characterization of plasma sources for film deposition and etching
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Applied Physics"
DOI: 10.1063/1.4995278
Abstract: Our recently reported multifunctional plasma and deposition sensor [Welzel et al., Appl. Phys. Lett. 102, 211605 (2013)] was used for the characterization of two different plasma sources: a magnetron sputtering deposition source and an ion… read more here.
Keywords: characterization; deposition etching; plasma; deposition ... See more keywords