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Published in 2021 at "Desalination"
DOI: 10.1016/j.desal.2021.115334
Abstract: Abstract The recent advancement of semiconductor devices to the near-atomic scale necessitated the development of atomic layer processing methods, including molecular layer deposition (MLD). This gas-phase deposition technique creates semipermeable polymer films with precise control…
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Keywords:
layer;
desalination;
deposition;
molecular layer ... See more keywords