Selective Deposition of Hard Boron-Carbon Microstructures on Silicon
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DOI: 10.3390/ma14061397
Abstract: Boron-rich B-C compounds with high hardness have been recently synthesized by the chemical vapor deposition (CVD) method. In this paper, we present our successful efforts in the selective growth of microstructures of boron-carbon compounds on… read more here.
Keywords: deposition; selective deposition; deposition hard; boron carbon ... See more keywords