Influence of Deposition Modes and Thermal Annealing on Residual Stresses in Magnetron-Sputtered YSZ Membranes
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DOI: 10.3390/membranes12030346
Abstract: Thin-film electrolyte made of 8-mol% yttria stabilized zirconia (8YSZ) for solid oxide fuel cells (SOFCs) was fabricated on anode substrates using reactive magnetron sputtering of Zr-Y targets in a mixture of Ar and O2 gases.… read more here.
Keywords: residual stresses; thermal annealing; deposition modes; deposition ... See more keywords