Influence of PECVD Deposition Power and Pressure on Phosphorus-Doped Polysilicon Passivating Contacts
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DOI: 10.1109/jphotov.2020.3001166
Abstract: Passivating contacts for silicon solar cells can be fabricated by depositing a layer of intrinsic amorphous silicon (a-Si) by the plasma-enhanced chemical vapor deposition (PECVD) onto an oxidized silicon wafer, followed by a thermal POCl3… read more here.
Keywords: pecvd; power; deposition power; passivating contacts ... See more keywords