The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Transactions on Microwave Theory and Techniques"
DOI: 10.1109/tmtt.2020.2974835
Abstract: In this article, a novel minimally invasive approach to plasma monitoring in the challenging environment of dielectric deposition processes based on the planar multipole resonance probe (pMRP) is presented. By placing the sensor on the… read more here.
Keywords: dielectric deposition; minimally invasive; deposition processes; planar multipole ... See more keywords
Silver CVD and ALD Precursors: Synthesis, Properties, and Application in Deposition Processes
Sign Up to like & getrecommendations! Published in 2024 at "Molecules"
DOI: 10.3390/molecules29235705
Abstract: This review summarized the developments in the field of volatile silver complexes, which can serve as precursors in gas-transport reactions for the production of thin films and metal nanoparticles via chemical vapor deposition (CVD) and… read more here.
Keywords: cvd ald; ald precursors; deposition processes; deposition ... See more keywords
Tephra fallout from the long-lasting Tungurahua eruptive cycle (1999-2014): Variations through eruptive style transition and deposition processes
Sign Up to like & getrecommendations! Published in 2017 at "Andean Geology"
DOI: 10.5027/andgeov45n1-3036
Abstract: The Tungurahua volcano (Northern Andean Volcanic Zone) has been erupting since 1999, with at least four eruptive phases up to present. Although a dozen of research focuses in tephra fall deposits during this period, none… read more here.
Keywords: deposition processes; activity; deposition; 1999 2014 ... See more keywords