Design of Si-rich nitride interposer waveguides for efficient light coupling from InP-based QD-emitters to Si3N4 waveguides on a silicon substrate.
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DOI: 10.1364/oe.401225
Abstract: In this paper, we present a systematic analysis for the design of Si-rich-nitride (SRN) based interposer waveguide layers interfacing InP-based devices and Si3N4 waveguides, towards monolithic co-integration of active and passive elements through a Back-End-Of-Line… read more here.
Keywords: rich nitride; inp; design rich; si3n4 waveguides ... See more keywords