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Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3535-1
Abstract: A resonant accelerometer was designed and simulated in detail. The structure was composed of external frame and internal structure. The internal structure consists of a single proof mass, a pair of resonators and elastic beams.…
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Keywords:
simulations resonant;
design simulations;
resonant accelerometer;
structure ... See more keywords
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Published in 2018 at "Physical Review Accelerators and Beams"
DOI: 10.1103/physrevaccelbeams.21.120401
Abstract: J. D. Douglass, B. T. Hutsel, J. J. Leckbee, T. D. Mulville, B. S. Stoltzfus, M. L. Wisher, M. E. Savage, W. A. Stygar, E.W. Breden, J. D. Calhoun, M. E. Cuneo, D. J. De…
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Keywords:
100 linear;
cavity design;
design simulations;
driver cavity ... See more keywords