Design and Static Analysis of MEMS-Actuated Silicon Nitride Waveguide Optical Switch
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DOI: 10.3390/mi16080854
Abstract: This article aims to utilize a microelectromechanical system (MEMS) to modulate coupling behavior of silicon nitride (Si3N4) waveguides to perform an optical switch based on a directional coupling (DC) mechanism. There are two states of… read more here.
Keywords: static analysis; optical switch; design static; analysis mems ... See more keywords