Patterning approach for detecting defect in device manufacturing
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DOI: 10.1134/s1063782617120193
Abstract: Compact handheld devices which were a dream in the past are now a reality; this has been enabled by miniaturization of circuit architectures including power devices. Scaling down of the design feature sizes does come… read more here.
Keywords: approach detecting; inspection; patterning approach; detecting defect ... See more keywords