Detection of stable positive fixed charges in AlOx activated during annealing with in situ modulated PhotoLuminescence
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DOI: 10.1016/j.solmat.2021.111172
Abstract: Abstract An in situ Modulated Photoluminescence (MPL) measurement setup mounted on a Plasma Enhanced Chemical Vapor Deposition (PECVD) reactor is described. A method for deriving the actual minority carrier lifetime at the specific injection level… read more here.
Keywords: positive fixed; situ modulated; detection stable; modulated photoluminescence ... See more keywords