Ultrahigh-Sensitive CMOS pH Sensor Developed in the BEOL of Standard 28 nm UTBB FDSOI
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DOI: 10.1109/jeds.2018.2861622
Abstract: This paper reports ultrahigh-sensitive and ultralow-power CMOS compatible pH sensors that are developed in the back-end-of-line (BEOL) of industrial 28-nm ultrathin body and buried oxide (UTBB) fully depleted silicon-on-insulator (FDSOI) transistors. Fabricating the sensing gate… read more here.
Keywords: ultrahigh sensitive; cmos; utbb fdsoi; developed beol ... See more keywords