Multiparameter Method for Developer Screening of Molecular Glass Resists via Molecular Simulations.
Sign Up to like & getrecommendations! Published in 2024 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.4c11212
Abstract: Efficient and accurate developer screening is critical for high-resolution lithography. In this study, a multiparameter (MP) method simultaneously based on the Hansen solubility parameters (HSP), two-component solubility parameters (TSP), and order parameter (OP) is proposed… read more here.
Keywords: multiparameter method; screening molecular; molecular glass; developer screening ... See more keywords