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Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3320-1
Abstract: In this paper a 5 × 5 micromachined digital electromagnetic actuator array for microdisplacements is presented. Each elementary actuator is composed of a permanent magnet placed in a silicon square cavity. This magnet can be switched between…
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Keywords:
array;
micromachined electromagnetic;
array micromachined;
development array ... See more keywords
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Published in 2021 at "IEEE Transactions on Applied Superconductivity"
DOI: 10.1109/tasc.2021.3056322
Abstract: We describe optimization of a cryogenic magnetometer that uses nonlinear kinetic inductance in superconducting nanowires as the sensitive element instead of a superconducting quantum interference device (SQUID). The circuit design consists of a loop geometry…
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Keywords:
kinetic inductance;
development array;
inductance magnetometers;
magnetometers kims ... See more keywords