Optimization and development of the RF MEMS structures for low voltage, high isolation and low stress
Sign Up to like & getrecommendations! Published in 2019 at "Analog Integrated Circuits and Signal Processing"
DOI: 10.1007/s10470-019-01549-0
Abstract: MEMS capacitive switches have longer lifetimes compared to other types of metal-to-metal switches, and when placed on the membrane on the transmission line, they can easily return to the up-state due to a dielectric layer.… read more here.
Keywords: voltage; mems structures; optimization development; development mems ... See more keywords
Development of MEMS Multi-Mode Electrostatic Energy Harvester Based on the SOI Process
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DOI: 10.3390/mi8020051
Abstract: Multi-vibrational-mode electrostatic energy harvesters are designed and micro-machined utilizing a simple silicon-on-insulator (SOI) wafer-based process. Enhanced adaptability to various vibrational environments is achieved in the proposed design by using serpentine springs attached to the fishbone-shaped… read more here.
Keywords: serpentine springs; development mems; process; electrostatic energy ... See more keywords