Latest Developments in Multiple Ion Species Plasma FIB Technology
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DOI: 10.1017/s1431927619003581
Abstract: Compared to Ga+ liquid metal ion source (LMIS) DualBeam FIB-SEMs, Xe+ inductively couple plasma (ICP) DualBeams are relatively new [1]. Until recently, only Ga+ and Xe+ source technologies have been commercially available. LMIS Ga+ FIB… read more here.
Keywords: multiple ion; latest developments; developments multiple; technology ... See more keywords