Comparison of technologies for nano device prototyping with a special focus on ion beams: A review
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DOI: 10.1063/1.4972262
Abstract: Nano device prototyping (NDP) is essential for realizing and assessing ideas as well as theories in the form of nano devices, before they can be made available in or as commercial products. In this review,… read more here.
Keywords: ion; nano device; device prototyping; special focus ... See more keywords