A Proactive Plastic Deformation Method for Fine-Tuning of Metal-Based MEMS Devices After Fabrication
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DOI: 10.1109/jmems.2018.2871937
Abstract: An innovative plastic deformation method is proposed to tune metal-based MEMS devices after fabrication. The plastic deformation is a well-known failure mechanism in MEMS devices, which includes a phenomenon that the devices do not return… read more here.
Keywords: mems devices; devices fabrication; deformation; deformation method ... See more keywords