Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing
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DOI: 10.3390/mi15121461
Abstract: Microelectromechanical systems (MEMSs) are attracting increasing interest from the scientific community for the large variety of possible applications and for the continuous request from the market to improve performances, while keeping small dimensions and reduced… read more here.
Keywords: microelectromechanical system; resonant devices; devices guide; guide design ... See more keywords