Wafer-level heterogeneous integration of electrochemical devices and semiconductors for a monolithic chip
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DOI: 10.1093/nsr/nwae049
Abstract: ABSTRACT Micro-scale electrochemical devices, despite their wide applications and unique potential to achieve ‘More than Moore's law’, face significant limitations in constructing functional chips due to their inability to integrate with semiconductors. In this study,… read more here.
Keywords: integration; heterogeneous integration; devices semiconductors; chip ... See more keywords