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Published in 2023 at "Micromachines"
DOI: 10.3390/mi14050925
Abstract: Polymer-derived SiCNFe ceramics is a prospective material that can be used as soft magnets in MEMS magnetic applications. The optimal synthesis process and low-cost appropriate microfabrication should be developed for best result. Homogeneous and uniform…
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Keywords:
mems magnetic;
material;
magnetic material;
devices ssbauer ... See more keywords