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Published in 2018 at "Bulletin of the Russian Academy of Sciences: Physics"
DOI: 10.3103/s1062873818080403
Abstract: A fundamentally new way of fabricating a diffraction grating on a surface of diamond via ion (boron) implantation through a superimposed mask is proposed. It is found that graphitization occurs during ion irradiation in unmasked…
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Keywords:
diffraction grating;
ion;
diamond diffraction;
implantation ... See more keywords