Anisotropic diamond etching through thermochemical reaction between Ni and diamond in high-temperature water vapour
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DOI: 10.1038/s41598-018-25193-2
Abstract: Diamond possesses excellent physical and electronic properties, and thus various applications that use diamond are under development. Additionally, the control of diamond geometry by etching technique is essential for such applications. However, conventional wet processes… read more here.
Keywords: diamond high; diamond etching; high temperature; thermochemical reaction ... See more keywords
Diamond Etching Beyond 10 μm with Near-Zero Micromasking
Sign Up to like & getrecommendations! Published in 2019 at "Scientific Reports"
DOI: 10.1038/s41598-019-51970-8
Abstract: To exploit the exceptional properties of diamond, new high quality fabrication techniques are needed to produce high performing devices. Etching and patterning diamond to depths beyond one micron has proven challenging due to the hardness… read more here.
Keywords: etching beyond; zero micromasking; beyond near; diamond etching ... See more keywords