Polishing Performance and Removal Mechanism of Core-Shell Structured Diamond/SiO2 Abrasives on Sapphire Wafer
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DOI: 10.3390/mi13122160
Abstract: Corrosive and toxic solutions are normally employed to polish sapphire wafers, which easily cause environmental pollution. Applying green polishing techniques to obtain an ultrasmooth sapphire surface that is scratch-free and has low damage at high… read more here.
Keywords: sapphire; sio2; diamond sio2; polishing performance ... See more keywords