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Published in 2018 at "Journal of Electronic Materials"
DOI: 10.1007/s11664-018-6727-2
Abstract: In this study, a low-cost aluminum nitride (AlN) sintering process to produce thick AlN film substrate with a high thermal conductivity is developed. The thermal conductivity of the present produced thick AlN film substrate is…
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Keywords:
die;
aluminum nitride;
die bonding;
bonding process ... See more keywords