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Published in 2020 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2020.111276
Abstract: Abstract We present an innovative process to realize planar GaN microcavities, based on transferrable high-quality oxide-based Distributed-Bragg-Reflector (t-DBR) membranes. Unlike the widely used direct DBR deposition, which is not always feasible, the concept of t-DBR…
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Keywords:
pair;
transferrable dielectric;
dbr;
dbr membranes ... See more keywords