Characterization of dielectric diffraction gratings on multilayer structures by spectroscopic ellipsometry
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DOI: 10.1063/5.0215882
Abstract: Gratings are widely used for coupling into and out of evanescent and propagating electromagnetic modes, which are otherwise not accessible due to their large in-plane wave vector. A precise description of the optical response requires… read more here.
Keywords: spectroscopic ellipsometry; dielectric diffraction; multilayer; characterization dielectric ... See more keywords