Properties-Adjustable Alumina-Zirconia Nanolaminate Dielectric Fabricated by Spin-Coating
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DOI: 10.3390/nano7120419
Abstract: In this paper, an alumina-zirconia (Al2O3-ZrO2) nanolaminate dielectric was fabricated by spin-coating and the performance was investigated. It was found that the properties of the dielectric can be adjusted by changing the content of Al2O3/ZrO2… read more here.
Keywords: spin coating; alumina zirconia; fabricated spin; dielectric fabricated ... See more keywords