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Published in 2019 at "Applied optics"
DOI: 10.1364/ao.58.004300
Abstract: Process errors of dielectric gratings are divided into two classes: shape errors and dimension errors. A theoretical model of dielectric gratings with process errors has been proposed, and a beam propagation model of a transmission…
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Keywords:
process errors;
errors dielectric;
dielectric gratings;
process ... See more keywords