Unpredicted Internal Geometric Reconfiguration of An Enclosed Space Formed by Hetero-epitaxy.
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DOI: 10.1021/acs.nanolett.9b04272
Abstract: Epitaxial lateral overgrowth (ELO) over a freestanding dielectric mask is an unexplored territory in selective epitaxy growth (SEG) of semiconductors. By shrinking the dielectric mask dimension to the micron scale, the growth fronts from ELO… read more here.
Keywords: unpredicted internal; dielectric mask; reconfiguration; enclosed space ... See more keywords