A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films
Sign Up to like & getrecommendations! Published in 2020 at "Materials Letters"
DOI: 10.1016/j.matlet.2020.127381
Abstract: Abstract We report on the morphological disparity of the columnar growth in W thin films sputter-deposited by oblique angle deposition. Oriented tungsten thin films (400 ± 50 nm thick) are prepared using a tilt angle α of 80°… read more here.
Keywords: sputter deposited; view imaging; microstructural differences; imaging reveal ... See more keywords