Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators
Sign Up to like & getrecommendations! Published in 2017 at "Journal of applied physics"
DOI: 10.1063/1.4979859
Abstract: In this paper, strain transfer efficiencies from a single crystalline piezoelectric lead magnesium niobate-lead titanate substrate to a GaAs semiconductor membrane bonded on top are investigated using state-of-the-art x-ray diffraction (XRD) techniques and finite-element-method (FEM)… read more here.
Keywords: strain transfer; different bonding; bonding techniques; comparison different ... See more keywords