Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials
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DOI: 10.15446/dyna.v85n204.65167
Abstract: Plasma-assisted techniques have been widely used for deposition of high quality thin films and metallurgical coatings. The glow plasma produced in the region between the electrodes and the chamber wall of a cathodic arc was… read more here.
Keywords: cathode materials; different cathode; plasma behavior; cathodic arc ... See more keywords