Improvement of Crystal Quality of AlN Films with Different Polarities by Annealing at High Temperature
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DOI: 10.3390/mi13010129
Abstract: High-quality AlN film is a key factor affecting the performance of deep-ultraviolet optoelectronic devices. In this work, high-temperature annealing technology in a nitrogen atmosphere was used to improve the quality of AlN films with different… read more here.
Keywords: aln films; different polarities; crystal quality; quality ... See more keywords