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Published in 2022 at "IEEE Transactions on Instrumentation and Measurement"
DOI: 10.1109/tim.2022.3178985
Abstract: Differential confocal microscopy (DCM) is a powerful tool for mapping the 3-D topography of samples at micrometer and submicrometer scales. However, the limited vertical scanning range of conventional DCM makes it challenging to obtain 3-D…
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Keywords:
confocal microscopy;
vertical scanning;
microscopy;
range ... See more keywords
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Published in 2021 at "Optics express"
DOI: 10.1364/oe.433012
Abstract: To meet the current need for high-precision and environment-insensitive measurement of the radius of curvature (ROC), we proposed a transverse differential confocal radius measurement (TDCRM) method based on the optical system of the confocal ROC…
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Keywords:
high precision;
radius measurement;
differential confocal;
confocal radius ... See more keywords
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Published in 2022 at "Optics express"
DOI: 10.1364/oe.474700
Abstract: A normal transverse laser differential confocal freeform measurement (NTDCFM) method was proposed to address the high-precision measurement difficulty of steep freeform surfaces with large variations in inclination, scattering, and reflectance. Using D-shaped diaphragm technology, the…
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Keywords:
normal transverse;
steep freeform;
differential confocal;
method ... See more keywords
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Published in 2023 at "Micromachines"
DOI: 10.3390/mi14061163
Abstract: Quantifying free-form surfaces using differential confocal microscopy can be challenging, as it requires balancing accuracy and efficiency. When the axial scanning mechanism involves sloshing and the measured surface has a finite slope, traditional linear fitting…
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Keywords:
based peak;
strategy based;
pearson correlation;
strategy ... See more keywords