X-ray mirrors with sub-nanometre figure errors obtained by differential deposition of thin WSi2 films.
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DOI: 10.1107/s1600577523003697
Abstract: Differential deposition by DC magnetron sputtering was applied to correct for figure errors of X-ray mirrors to be deployed on low-emittance synchrotron beamlines. During the deposition process, the mirrors were moved in front of a… read more here.
Keywords: wsi2; differential deposition; deposition; ray mirrors ... See more keywords