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Published in 2023 at "Powder Diffraction"
DOI: 10.1017/s088571562300012x
Abstract: X-ray fluorescence (XRF) is frequently used to measure layer thickness in the micrometer range. But also X-ray diffraction (XRD) can be used in a comparable way and offers the benefit to differentiate coating layers by…
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Keywords:
coating thickness;
ray diffraction;
diffraction measurement;
diffraction ... See more keywords
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Published in 2017 at "Journal of Applied Crystallography"
DOI: 10.1107/s1600576717003132
Abstract: X-ray diffraction imaging in both monochromatic and white beam section mode has been used to measure quantitatively the displacement and warpage stress in encapsulated silicon devices.
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Keywords:
ray diffraction;
diffraction measurement;
warpage;
nondestructive ray ... See more keywords