Diffusion properties of n-type dopants diffused from spin on glass into Ge
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DOI: 10.1063/5.0002070
Abstract: Solid phase diffusion properties of three typical n-type dopants (P, As, and Sb) in Ge have been studied through experimental depth profiles of dopants diffused from spin on glass (SOG) films. Numerical calculations of dopant… read more here.
Keywords: type dopants; diffused spin; diffusion properties; diffusion ... See more keywords