Microstructure of reactive magnetron sputtered S-phase coatings with a diffusion sub-layer
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DOI: 10.1016/j.vacuum.2017.05.011
Abstract: Abstract The main objective of the work was to investigate the microstructure of S-phase coatings obtained by reactive magnetron sputtering at different temperatures and with various nitrogen concentrations in the working atmosphere. Particular attention was… read more here.
Keywords: diffusion sub; diffusion; reactive magnetron; sub layer ... See more keywords