A Measuring Method for Nano Displacement Based on Fusing Data of Self-Sensing and Time-Digit-Conversion
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DOI: 10.1109/access.2019.2960386
Abstract: Accurate and rapid measuring methods for displacement of nano-scale is necessary for manipulation. Self-sensing and time-digit-conversion(TDC) are two applicable measuring methods especially suitable for room-limited workspaces and vacuum-compliance required applications, thanks to their space-saving advantage… read more here.
Keywords: self sensing; time digit; digit conversion; sensing time ... See more keywords