Digital lithography based on renewable materials as a tool for environmentally benign microfabrication
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Cleaner Production"
DOI: 10.1016/j.jclepro.2017.11.102
Abstract: Abstract In this work, a novel environmentally friendly method for the microstructuring of metal thin films, which is an essential fabrication step within the production of microchips, is presented. Through employing digital lithography by inkjet… read more here.
Keywords: thin films; lithography based; metal thin; digital lithography ... See more keywords
Scanning digital lithography providing high speed large area patterning with diffraction limited sub-micron resolution
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aabb1f
Abstract: A scanning digital lithography system using computer controlled digital spatial light modulator, spatial filter, infinity correct optical microscope and high precision translation stage is proposed and examined. Through utilizing the spatial filter to limit orders… read more here.
Keywords: resolution; scanning digital; lithography; digital lithography ... See more keywords