A digital readout interface for a surface micromachined MEMS accelerometer with a novel loop compensator
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DOI: 10.1142/s0217984920503029
Abstract: This paper proposes a novel digital readout interface for capacitive MEMS accelerometer. The digitalization is fulfilled by incorporating a 1-bit [Formula: see text] (sigma-delta) modulator into the closed servo loop. It both realizes a direct… read more here.
Keywords: readout interface; see text; formula see; digital readout ... See more keywords