Digital Tri-Axis Accelerometer with X/Y-Axial Resonators and Z-Axial Capacitive Seesaw
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DOI: 10.3390/mi13081174
Abstract: A tri-axis accelerometer with a digital readout circuit and communication system is introduced. It is composed of two resonant accelerometers in the x and y-axis, and a seesaw capacitive one in the z-axis. The device… read more here.
Keywords: digital tri; tri axis; axis; axis accelerometer ... See more keywords